300 mm semi-automated probe system

• Up to 300 mm (12") capability
• Unique Mercury probe: Dot area 5E-5 to 0.6 cm2
• Contact configurations: Dot, Dot / Ring, Dot / 2 Rings
• Refreshed mercury before each contact insures clean contact

200 mm 4 Point Probe Station

• Sheet resistance
• Automated Sheet Resistivity Meter
• 1 mOhm / square to 800 kOhm / square
• Extended range up to 8x1011W/sq
• Temperature compensation option
• Up to to 8" wafer capability or 156mm x 156mm