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SEMICONDUCTOR

FormFactor

CM300

300 mm semi-/ fully-automated probe system

  • DC, AC and RF/microwave device characterization, 1/f, WLR, FA and design debug
  • Full thermal range of -60°C to +300°C
  • Usage of manual and motorized positioners, probe cards within EMI-shielded environment
  • Applications : IV/CV, RF/mmW, Failure Analysis, WLR

TESLA200

200mm Semi/Fully-Automated on-wafer Power Device Characterization System

  • Designed specifically for IGBT/power MOSFET (GaN, SiC, Si) device measurements at the wafer level, the new TESLA200 on-wafer power semiconductor probing system is engineered to provide accurate data up to 3 kV (triaxial) / 10 kV (coaxial) and 200 A (standard) / 600 A (high current)
  • Applications : High Power

Summit200

Advanced 200mm Semi/Fully-Automated Probe System

  • Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
  • Minimize AC and spectral noise with effective shielding capability
  • Applications : IV/CV, RF/mmW, Failure Analysis, Silicon Photonics, MEMS

PAC200

200 mm semi-automated cryogenic probe system

  • High vacuum environment, at cryogenic temperatures down to 77 K with liquid nitrogen or < 20 K with liquid helium
  • Applications: IV/CV, RF/mmW, Opto, MEMS

PAC200

200mm Manual Cryogenic Probe Station

  • The PAC200 is a highly-precise semi-automated probe station for wafers and substrates up to 200 mm in a high vacuum environment, at cryogenic temperatures down to 77 K with liquid nitrogen or < 20 K with liquid helium.
  • Applications : IV/CV, RF/mmW, Opto, MEMS

PAV200

200 mm semi-automated vacuum and pressure probe system

  • The PAP200 is a highly-precise semi-automated probing solution for wafers and substrates up to 200 mm in a vacuum environment down to < 1×10-5 mbar or in an overpressure environment up to 4.0 bar (abs.)
  • Applications: IV/CV, RF/mmW, Opto, MEMS

PA200 BlueRay

200 mm semi-/ fully-automated production probe system

  • The PA200 BlueRay™ enables high-throughput functional testing of optoelectronic (e.g. LED), MEMS (e.g. pressure sensors) and RF (e.g. SAW/BAW filters) devices.
  • Applications: RF/mmW, Opto, MEMS

EPS150

150mm Manual Probe Station

  • Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
  • Highly accurate measurement results
  • Solid station frame
  • Compact and rigid mechanical design
  • Applications : IV/CV, RF/mmW, Opto, MEMS